Hostname: page-component-848d4c4894-jbqgn Total loading time: 0 Render date: 2024-06-28T15:45:58.894Z Has data issue: false hasContentIssue false
  • English
  • Français

Fabrication of CNT/metal torsional resonator structures on GaAs

Published online by Cambridge University Press:  01 February 2011

Seung Sae Hong ,
Jung Hoon Bak ,
Byung Yang Lee ,
Sung Woon Cho ,
Young Duck Kim ,
Seunghun Hong  and
Yun Daniel Park
Seung Sae Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, Seoul, 151-747, Korea, Republic of, 8228852361, 8228822361
Jung Hoon Bak
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Byung Yang Lee
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Sung Woon Cho
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Young Duck Kim
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Seunghun Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Yun Daniel Park
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Get access

Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Keywords

microelectro-mechanical (MEMS)compositenanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1018: Symposium EE – Applications of Nanotubes and Nanowires , 2007 , 1018-EE08-12
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. LeeM, et al. , Linker-free directed assembly of high-performance integrated devices based on nanotubes and nanowires. Nature Nanotechnology, 2006. 1(1): p. 66–71.Google Scholar
2. Mann, D. et al. , Ballistic transport in metallic nanotubes with reliable Pd ohmic contacts. Nano Letters, 2003. 3(11): p. 1541–1544.Google Scholar
3. Javey, A. et al. , Ballistic carbon nanotube field-effect transistors. Nature, 2003. 424(6949): p. 654–657.Google Scholar
4. Fuhrer, M.S. et al. , Crossed nanotube junctions. Science, 2000. 288(5465): p. 494–497.Google Scholar
5. Whittaker, J.D. et al. , Measurement of the adhesion force between carbon nanotubes and a silicon dioxide substrate. Nano Letters, 2006. 6(5): p. 953–957.Google Scholar
6. Cohen-Karni, T. et al. , Torsional electromechanical quantum oscillations in carbon nanotubes. Nature Nanotechnology, 2006. 1(1): p. 36–41.Google Scholar
7. Stampfer, C. et al. , Nano-electromechanical displacement sensing based on single-walled carbon nanotubes. Nano Letters, 2006. 6(7): p. 1449–1453.Google Scholar
8. Craighead, H.G., Nanoelectromechanical systems. Science, 2000. 290(5496): p. 1532–1535.Google Scholar
9. Cleland, A.N. and Roukes, M.L., Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Applied Physics Letters, 1996. 69(18): p. 2653–2655.Google Scholar
10. Evoy, S. et al. , Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators. Journal of Applied Physics, 1999. 86(11): p. 6072–6077.Google Scholar
11. Xiong, Q.H. et al. , Force-deflection spectroscopy: A new method to determine the Young's modulus of nanofilaments. Nano Letters, 2006. 6(9): p. 1904–1909.Google Scholar