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Fabrication of CNT/metal torsional resonator structures on GaAs

Published online by Cambridge University Press:  01 February 2011

Seung Sae Hong ,
Jung Hoon Bak ,
Byung Yang Lee ,
Sung Woon Cho ,
Young Duck Kim ,
Seunghun Hong  and
Yun Daniel Park
Seung Sae Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, Seoul, 151-747, Korea, Republic of, 8228852361, 8228822361
Jung Hoon Bak
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Byung Yang Lee
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Sung Woon Cho
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Young Duck Kim
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Seunghun Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Yun Daniel Park
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
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Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Keywords

microelectro-mechanical (MEMS)compositenanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1018: Symposium EE – Applications of Nanotubes and Nanowires , 2007 , 1018-EE08-12
Copyright
Copyright © Materials Research Society 2007

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References

1. LeeM, et al. , Linker-free directed assembly of high-performance integrated devices based on nanotubes and nanowires. Nature Nanotechnology, 2006. 1(1): p. 66–71.Google Scholar
2. Mann, D. et al. , Ballistic transport in metallic nanotubes with reliable Pd ohmic contacts. Nano Letters, 2003. 3(11): p. 1541–1544.Google Scholar
3. Javey, A. et al. , Ballistic carbon nanotube field-effect transistors. Nature, 2003. 424(6949): p. 654–657.Google Scholar
4. Fuhrer, M.S. et al. , Crossed nanotube junctions. Science, 2000. 288(5465): p. 494–497.Google Scholar
5. Whittaker, J.D. et al. , Measurement of the adhesion force between carbon nanotubes and a silicon dioxide substrate. Nano Letters, 2006. 6(5): p. 953–957.Google Scholar
6. Cohen-Karni, T. et al. , Torsional electromechanical quantum oscillations in carbon nanotubes. Nature Nanotechnology, 2006. 1(1): p. 36–41.Google Scholar
7. Stampfer, C. et al. , Nano-electromechanical displacement sensing based on single-walled carbon nanotubes. Nano Letters, 2006. 6(7): p. 1449–1453.Google Scholar
8. Craighead, H.G., Nanoelectromechanical systems. Science, 2000. 290(5496): p. 1532–1535.Google Scholar
9. Cleland, A.N. and Roukes, M.L., Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Applied Physics Letters, 1996. 69(18): p. 2653–2655.Google Scholar
10. Evoy, S. et al. , Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators. Journal of Applied Physics, 1999. 86(11): p. 6072–6077.Google Scholar
11. Xiong, Q.H. et al. , Force-deflection spectroscopy: A new method to determine the Young's modulus of nanofilaments. Nano Letters, 2006. 6(9): p. 1904–1909.Google Scholar