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Fabrication and Properties of Epitaxial Lithium Niobate Thin Films by Combustion Chemical Vapor Deposition (CCVD)

Published online by Cambridge University Press:  17 March 2011

Yong Dong Jiang ,
Jake McGee ,
Todd A. Polley ,
Robert E. Schwerzel  and
Andrew T. Hunt
Yong Dong Jiang
Affiliation:
MicroCoating Technologies, 5315 Peachtree Industrial Blvd, Atlanta, GA 30341, USA
Jake McGee
Affiliation:
MicroCoating Technologies, 5315 Peachtree Industrial Blvd, Atlanta, GA 30341, USA
Todd A. Polley
Affiliation:
MicroCoating Technologies, 5315 Peachtree Industrial Blvd, Atlanta, GA 30341, USA
Robert E. Schwerzel
Affiliation:
MicroCoating Technologies, 5315 Peachtree Industrial Blvd, Atlanta, GA 30341, USA
Andrew T. Hunt
Affiliation:
MicroCoating Technologies, 5315 Peachtree Industrial Blvd, Atlanta, GA 30341, USA
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Abstract

Lithium niobate has a wide variety of applications because of its excellent ferroelectric, piezoelectric and electrooptic properties. In this study, epitaxial lithium niobate thin films were deposited on c-sapphire (α-Al2O3) by the low-cost, open-atmosphere Combustion Chemical Vapor Deposition (CCVD) technique developed by MicroCoating Technologies, Inc. It was found that deposition temperature plays a critical role in determining the growth behavior and quality of the lithium niobate thin films. XRD measurements show that the lithium niobate films are epitaxial with two in-plane orientations (twin structure). A surface roughness (root mean square) of about 4 nm was obtained from the deposited film (about 200 nm thick), as measured by optical profilometry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 688: Symposium C – Ferroelectric Thin Films X , 2001 , C8.9.1
Copyright
Copyright © Materials Research Society 2002

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