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Extended X-ray Absorption Fine Structure Studies of InGaN Epilayers

Published online by Cambridge University Press:  01 February 2011

V. Katchkanov ,
K.P. O'Donnell ,
J.F.W. Mosselmans ,
S. Hernandez ,
R.W. Martin ,
Y. Nanishi ,
M. Kurouchi ,
I. Watson ,
W. Van der Stricht  and
E. Calleja
V. Katchkanov
Affiliation:
Department of Physics, Strathclyde University, Scotland, U.K. Synchrotron Radiation Department, CCLRC Daresbury Laboratory, Warrington, U.K.
K.P. O'Donnell
Affiliation:
Department of Physics, Strathclyde University, Scotland, U.K.
J.F.W. Mosselmans
Affiliation:
Synchrotron Radiation Department, CCLRC Daresbury Laboratory, Warrington, U.K.
S. Hernandez
Affiliation:
Department of Physics, Strathclyde University, Scotland, U.K.
R.W. Martin
Affiliation:
Department of Physics, Strathclyde University, Scotland, U.K.
Y. Nanishi
Affiliation:
Department of Photonics, School of Science and Engineering, Ritsumeikan University, Japan
M. Kurouchi
Affiliation:
Department of Photonics, School of Science and Engineering, Ritsumeikan University, Japan
I. Watson
Affiliation:
Institute of Photonics, Strathclyde University, Scotland, U.K.
W. Van der Stricht
Affiliation:
University of Ghent, Ghent, Belgium
E. Calleja
Affiliation:
Departamento de Ingeniería Electrónica, Universidad Politécnica de Madrid, Madrid, Spain
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Abstract

The local structure around In atoms in InGaN epilayers grown by Molecular Beam Epitaxy (MBE) and by Metal-Organic Chemical Vapour Deposition (MOCVD) was studied by means of Extended X-ray Absorption Fine Structure (EXAFS). The averaged In fraction of MOCVD grown samples ranged from 10% to 40% as estimated by Electron Probe Microanalysis (EPMA). The In fraction of MBE grown samples spanned the range from 13% to 96%. The In–N bond length was found to vary slightly with composition, both for MBE and MOCVD grown samples. Moreover, for the same In content, the In-N bond lengths in MOCVD samples were longer than those in MBE grown samples. In contrast, the In-In radial separations in MOCVD and MBE samples were found to be indistinguishable for the same In molar fraction. The In-Ga bond length was observed to deviate from average cation-cation distance predicted by Vegard's law for MBE grown samples which indicates alloy compositional fluctuations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 831: Symposium E – GaN, AlN, InN, and Their Alloys , 2004 , E3.30
Copyright
Copyright © Materials Research Society 2005

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