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Excimer Laser Induced Patterning of PSZT and PLZT Flms

Published online by Cambridge University Press:  01 February 2011

Patrick William Leech  and
Anthony S Holland
Patrick William Leech
Affiliation:
[email protected], Molecular and Health Technologies, CSIRO, Bayview Crescent,, Clayton, 3168, Australia, +613-95452791
Anthony S Holland
Affiliation:
[email protected], RMIT, School of Electrical and Computer Engineering, Melbourne, N/A, Australia
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Abstract

The patterning of strontium-doped lead zirconium titanate (PSZT) and lanthanum-doped lead zirconium titanate (PLZT) films has been examined using excimer laser radiation. Both types of film were deposited by rf magnetron sputtering using in-situ heating and a controlled cooling rate in order to obtain the perovskite-oriented phase. The depth of laser ablation in both PSZT and PLZT films showed a logarithmic dependence on fluence. The threshold fluence required to initiate ablation was ∼1.25 mJ/cm2 for PLZT and ∼1.87 mJ/cm2 for PSZT films. The ablation rate of PLZT films was slightly higher than that of PSZT films over the range of fluence (10-150 J/cm2) and increased linearly with number of pulses. The higher ablation rate of PLZT films has been attributed to the finer grainsize (160-200 nm) than in the PSZT films (1.0-1.2 µm).

Keywords

ablationlaser ablationferroelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD06-03
Copyright
Copyright © Materials Research Society 2008

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