Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-25T18:41:04.475Z Has data issue: false hasContentIssue false
  • English
  • Français

Examples of Diamond Sensing Applications

Published online by Cambridge University Press:  10 February 2011

J. L. Davidson  and
W. P. Kang
J. L. Davidson
Affiliation:
AES Department and ECE Department, Vanderbilt University, Nashville, TN 37235
W. P. Kang
Affiliation:
AES Department and ECE Department, Vanderbilt University, Nashville, TN 37235
Get access

Abstract

Diamond has attractive properties as an advanced electronic material. Its combination of high carrier mobility, electric breakdown, and thermal conductivity results in the largest calculated figures of merit for speed and power of any material. Recently, the discovery and development of what might be called sophisticated secondary effects in diamond, are opening interesting sensor applications. Boron doped diamond will change electrical resistance with strain (piezoresistance), meaning it can be used as a strain gauge on rugged electronic microsensors for pressure and acceleration sensing. This paper will present some critical issues of diamond for microelectromechanical sensing applications such as its rupture stress and edge stress of diamond diaphragms and the high temperature responses of a diamond pressure sensor. We will describe an all diamond pressure microsensor that measures pressure at more than 300°C. Also, we have observed that layered diamond films can behave as chemical sensors measuring hydrogen, oxygen and many other chemicals’ concentration. For example, a diamond-based chemical gas sensor using Pd/i-diamond/p+-diamond metal-insulator-semiconductor diode structure has been made and the behavior of a new diamond-based chemical gas sensor has been studied. Also, the creation and properties of diamond microtips as field emitters are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 397
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Wur, D. R., Davidson, J. L., Kang, W. P., and Kinser, D. L., Third International Symposium on Diamond Materials, 183rd Meeting of the Electrochemical Society, Honolulu, Hawaii, May 1993.Google Scholar
2. Wur, D., Davidson, J. L., and Kang, W. P., “A Polycrystalline Diamond Film Piezoresistive Microsensor,” Transducers 1993, Yokohama, Japan, July, 1993.Google Scholar
3. Design Considerations for Diaphragm Pressure Transducers, Micro-Measurements Tech. Note, 129, 1968.Google Scholar
4. Edwards, L. M. and Davidson, J. L., Proceedings of 3rd European Conference on Diamond, Diamond-like and Related Coatings, Heidelberg, Germany, Aug., 1992.Google Scholar
5. Wur, D.R., Davidson, J.L., Wang, J.P., and Ling, Y.C., “Dopant Concentration Dependence of Piezoresistive Effect in Boron Doped Polycrystalline Diamond Films”, Fifth Annual Diamond Workshop, Wayne State University, Troy, MI, May, 1994.Google Scholar
6. Frenklach, M., J. Appl. Phys. 65 (12),5142–5149, 1989.Google Scholar
7. Davidson, J. L., Shor, J. S., Wur, D. R. and Kurtz, A. D., Third International Symposium on Diamond Materials, 183rd Meeting of the Electrochemical Society, Honolulu, Hawaii, May 1993.Google Scholar
8. Wur, D. R.. , W., Davidson, J. L.., Kang, W. P.., Kinser, D. L.., “Polycrystalline Diamond Pressure Sensor,” IEEE J. Microelectromechanical Systems, Vol. 4, No. 1, March, 1995.Google Scholar
9. Sze, S. M., Physics of Semiconductor Devices (Weley-Interscience, New York, 1981)Google Scholar
10. Kang, W. P., Gurbuz, Y., Davidson, J. L. and Kerns, D. V., “A Polycrystalline Diamond Thin- Film-Based Hydrogen Sensor, ” Sensors andActuators B, Vol. 24–25, pp. 421–425, 1995.Google Scholar
11. Spindt, C. A., et al., “Research into Micron-size Emission Tubes”, IEEE Conf. on Tube Techniques, 1966.Google Scholar
12. Kang, W. P., Davidson, J. L., “Patterned Diamond Field Emitter Arrays,” submitted to, J. Vac. Sci. Tech.Google Scholar