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Evolution of Ion Beam Synthesized Au Nanoclusters in SiO2 under Ion Irradiation

Published online by Cambridge University Press:  17 March 2011

Bernd Schmidt ,
Karl-Heinz Heinig  and
Arndt Mücklich
Bernd Schmidt
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung PO-BOX 510119, 01314 Dresden, Germany
Karl-Heinz Heinig
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung PO-BOX 510119, 01314 Dresden, Germany
Arndt Mücklich
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung PO-BOX 510119, 01314 Dresden, Germany
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Abstract

The evolution of the mean size and the size distribution of Au nanoclusters (NCs) under high-energy ion irradiation has been studied. Au NCs were synthesized in a 480 nm thick SiO2 layer by 330 keV Au+ implantation and subsequent annealing at T = 1000 °C for 1h in dry O2. XTEM images show a 70 nm thick layer of Au NCs, being centered at the projected ion range Rp(330keV) = 100 nm, having a mean NC size of 5 nm at Rp, and resembling the broad Lifshiz-Slyozov-Wagner (LSW) size distribution of diffusion controlled Ostwald ripening. Post-irradiation of the Au NCs by 4.5 MeV gold ions was used in order to tailor their size and size distribution. The high-energy Au+ irradiations were performed at 190...210 °C with a fluence of (0.5...1.0)×1016 cm-2. By the post-irradiation no gold was deposited into the SiO2 layer, the Au+ ions come to rest in the (001)Si substrate at Rp(4.5MeV) = 1 [.proportional]m. XTEM images of the post-irradiated Au NCs show a strong decrease of their mean size as well as the width of their size distribution. The observed NC evolution under ion irradiation agrees with recent theoretical predictions and kinetic Monte-Carlo simulations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 647: Symposium O – Ion Beam Synthesis & Processing of Advanced Materials , 2000 , O11.20
Copyright
Copyright © Materials Research Society 2001

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