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Evidence of strong indium segregation in MOCVD InxGa1-xN/GaN quantum layers

Published online by Cambridge University Press:  01 February 2011

Grzegorz Maciejewski ,
Grzegorz Jurczak ,
Sławomir Kret ,
Paweł Dłużewski  and
Pierre Ruterana
Grzegorz Maciejewski
Affiliation:
Institute of Fundamental Technological Research PAS, Świętokrzyska 21, 00–049 Warsaw, Poland
Grzegorz Jurczak
Affiliation:
Institute of Fundamental Technological Research PAS, Świętokrzyska 21, 00–049 Warsaw, Poland
Sławomir Kret
Affiliation:
Institute of Physics PAS, Al. Lotników 32/36, 02–668 Warsaw, Poland
Paweł Dłużewski
Affiliation:
Institute of Fundamental Technological Research PAS, Świętokrzyska 21, 00–049 Warsaw, Poland
Pierre Ruterana
Affiliation:
SIFCOM, UMR6176, ENSICAEN-CNRS, 6 Bd Maréchal Juin, 14050 Caen Cedex, France
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Abstract

An investigation of 1–5 nm in diameter indium rich clusters in MOCVD InxGa1-xN/GaN quantum well is carried out. To this end, quantitative High Resolution Transmission Electron Microscopy (HRTEM) is coupled with the Finite Element Method (FEM) for the calculation of thin foil relaxation and for image simulation. The measurement of the tetragonal distortion from HRTEM images is a useful tool for the determination of chemical composition in heterostructures. However, for a correct interpretation of the measured lattice distortion on HRTEM images, one needs to take into account the strain averaging across TEM sample and inhomogeneous relaxation of the sample. As a first step, 3D FEM simulation of the relaxation process as a function of the position of indium rich cluster relative to the foil surface is performed. Next, the calculated 3D displacement field is used to simulate the HRTEM images. The results clearly show that the magnitude of the strain field depends on the cluster position. It is concluded that the HRTEM images of indium rich clusters can differ even for the same indium content due to different positions of the clusters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 798: Symposium Y – GaN and Related Alloys , 2003 , Y10.55
Copyright
Copyright © Materials Research Society 2004

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References

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