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Evaluation of the Strain Field Inside and Around Growth Islands by Means of X-Ray Diffuse Scattering

Published online by Cambridge University Press:  10 February 2011

Martin Schmidbauer ,
Thomas Wiebach ,
Helmut Raidt ,
Peter Schäfer ,
Michael hanke ,
Rolf Köhler ,
Wolfgang Neumann ,
Holm Kirmse ,
Michael Rabe  and
Fritz Henneberger
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Martin Schmidbauer
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Thomas Wiebach
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Helmut Raidt
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Peter Schäfer
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Michael hanke
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Rolf Köhler
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Wolfgang Neumann
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Holm Kirmse
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Michael Rabe
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Fritz Henneberger
Affiliation:
Institut für Physik, Humboldt-Universität zu Berlin, D-10117 Berlin, Germany, [email protected]
Herbert Wawra
Affiliation:
Institut für Kristallzüchtung, D-12489 Berlin, Germany
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Abstract

The strain distribution inside and in the vicinity of coherently strained self-organized islands has been investigated by high-resolution x-ray diffraction (HRXRD). Finite element method (FEM) calculations were carried out in order to calculate the strain field, which was then used to simulate x-ray reciprocal space maps on the basis of kinematical scattering theory. For Si0 75Ge0.25 islands an abrupt increase in the Ge-concentration at about one third of the island height has been found. This behavior can be attributed to different nucleation stages during growth. Highly strained buried CdSe quantum dots (QDs) strongly influence the surrounding ZnSe matrix. From reciprocal space maps and FEM simulations we were able to estimate the shape and size of the islands. The results are in agreement with transmission electron microscopy (TEM) and UHV atomic force microscopy (AFM) data.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 583 , 1999 , 119
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

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