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Evaluation of a New Strategy for Transverse Tem Specimen Preparation by Focused-Ion-Beam Thinning
Published online by Cambridge University Press: 10 February 2011
Abstract
In this paper, different variations of a recently developed focused ion beam (FIB)-based TEM specimen preparation technique are studied conceptually and experimentally, compared, and evaluated. This procedure mainly consists of formation, removal, transport, and mounting of an electron transparent transverse membrane on a support grid for TEM study. Based on the experimental results obtained from this evaluation, some modifications have been conceived and implemented. These details as well as other critical information have been presented and discussed.
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- Copyright © Materials Research Society 1997
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