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Epitaxial BaTiO3 Thin Films on Different Substrates for Optical Waveguide Applications

Published online by Cambridge University Press:  10 February 2011

M. Siegert ,
Judit G. Lisoni ,
C. H. Lei ,
A. Eckau ,
W. Zander ,
C. L. Jia ,
J. Schubert  and
Ch. Buchal
M. Siegert
Affiliation:
Institut für Schicht- und Ionentechnik
Judit G. Lisoni
Affiliation:
Institut für Schicht- und Ionentechnik
C. H. Lei
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany, [email protected]
A. Eckau
Affiliation:
Institut für Schicht- und Ionentechnik
W. Zander
Affiliation:
Institut für Schicht- und Ionentechnik
C. L. Jia
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany, [email protected]
J. Schubert
Affiliation:
Institut für Schicht- und Ionentechnik
Ch. Buchal
Affiliation:
Institut für Schicht- und Ionentechnik
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Abstract

In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO3 thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl2O4(100), SrTiO3(100) and MgO buffered A12O3(1102) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO3 films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 597: Symposium PP – Thin Films for Optical Waveguide Devices & Materials … , 1999 , 145
Copyright
Copyright © Materials Research Society 2000

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References

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