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Enhanced Measurements of Displacements and Strains in Quasiperiodic Nanostructures

Published online by Cambridge University Press:  09 August 2013

Maciej Wielgus ,
Daniel Koguciuk ,
Zofia Sunderland ,
Krzysztof Patorski  and
Anna Piotrowska
Maciej Wielgus
Affiliation:
Institute of Micromechanics and Photonics, Warsaw University of Technology, ul. Św. A. Boboli 8, 02-525 Warszawa, Poland Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
Daniel Koguciuk
Affiliation:
Faculty of Mechatronics, Warsaw University of Technology, ul. Św. A. Boboli 8, 02-525 Warszawa, Poland
Zofia Sunderland
Affiliation:
Institute of Micromechanics and Photonics, Warsaw University of Technology, ul. Św. A. Boboli 8, 02-525 Warszawa, Poland
Krzysztof Patorski
Affiliation:
Institute of Micromechanics and Photonics, Warsaw University of Technology, ul. Św. A. Boboli 8, 02-525 Warszawa, Poland
Anna Piotrowska
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
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Abstract

Displacements and strains can be calculated from the microscopic image of a quasiperiodic structure by the analysis of its spectral content, consisting of a discrete set of peaks (Bragg spots in the case of the crystal structure). Typically one would choose certain peak and evaluate the displacements by investigating its neighborhood. However, there is a large amount of redundancy in such an image, as similar measurement can be performed by choosing a different Bragg spot. We demonstrate an approach which in a systematic manner employs information from multiple Bragg spots for the displacement evaluation. This has a positive influence on the quality and robustness of the measurements.

Keywords

stress/strain relationshiptransmission electron microscopy (TEM)scanning probe microscopy (SPM)
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1554: Symposium U – Measurements of Atomic Arrangements and Local Vibrations in Nanostructured Materials , 2013 , mrss13-1554-u04-07
Copyright
Copyright © Materials Research Society 2013 

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References

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