Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-23T07:47:35.556Z Has data issue: false hasContentIssue false
  • English
  • Français

Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Chemical and Biological Analytes

Published online by Cambridge University Press:  01 February 2011

Timothy L. Porter ,
William Delinger  and
Robert L. Gunter
Timothy L. Porter
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
William Delinger
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
Robert L. Gunter
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
Get access

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of volatile organic compounds, industrial chemicals, and biological molecules. The EPM design incorporates a tiny piezoresistive microcantilever embedded or partially embedded into a material sensing layer. The sensing layer material is chosen so as to react to the desired analyte(s), and undergo a minute volumetric or vertical shift in dimension. In the present paper, we present results on the sensing of various VOC's, vaccinia virus in solution, carbon tetrachloride in vapor, and osmolality in human subjects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J13.18
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Porter, T.L., Eastman, M.P., Macomber, C., Delinger, W.G. and Zhine, R., Ultramicroscopy, 97, 365–369 (2003).Google Scholar
2 Porter, T.L., Eastman, M.P., Pace, D.L. and Bradley, M., Sensors and Actuators, A88, 47–51 (2001).Google Scholar
3 Porter, T.L., Eastman, M.P., Pace, D.L. and Bradley, M., Scanning, 22, 1–5 (2000).Google Scholar
4 Baselt, D.R., Lee, G.U. and Colton, R.J., J. Vac. Sci. Technol., 14(2), 789–793 (1996).Google Scholar
5 Gunter, R.L., Delinger, W., Porter, T.L., Stewart, R. and Reed, J., Medical Engineering and Physics, In Press.Google Scholar
6 Krevelen, D.W.V., in Properties of polymers (Elsevier, New York, 1976), chapter 7.Google Scholar
7 Porter, T.L., Delinger, W., Kooser, A., Manygoats, K. and Gunter, R., Sensors and Actuators (A), 107(3), 219–224 (2003).Google Scholar