Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-29T07:41:10.281Z Has data issue: false hasContentIssue false

Ellipsometry Studies of Semiconductor Surface Cleaning

Published online by Cambridge University Press:  21 February 2011

E.E. Irene
Affiliation:
Department of Chemistry, University of North Carolina Chapel Hill, North Carolina 27599-3290
Y.Y. Hu
Affiliation:
Department of Chemistry, University of North Carolina Chapel Hill, North Carolina 27599-3290
Get access

Abstract

Ellipsometry is shown to provide a sensitive evaluation of the surface cleaning process based on in-situ and ex-situ studies of the cleaning of Si, Ge, and InP surfaces. Both single wavelength and spectroscopic ellipsometry are shown to be applicable. The essentials of the measurement and sample results are discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yablonovitch, E., Allara, D.L., Chang, C.C., Gmitter, T. and Bright, T.B., Phys. Rev. Lett., 57, 249 (1986).Google Scholar
2. Irene, E.A., CRC Critical reviews in Solid State and Materials Science, Ed. Greene, J.E., Vol. 14(2), pp 175223 (1988).Google Scholar
3. Kern, W. and Poutinen, D.A., RCA Review, 31, 187 (1970).Google Scholar
4. Aspnes, D.E., Theeten, J.B. and Hottier, F., Phys. Rev. B, 20, 3992 (1979).Google Scholar
5. Aspnes, D.E., and Studna, A.A., Appi. Optics, 14, 220 (1975).Google Scholar
6. Irene, E.A., “Applications of Spectroscopic Ellipsometry to Microelectronics”, presented at First International Conference on Spectroscopic Ellipsometry, Paris, France, Jan. 11-14, 1993 and accepted for publication in Thin Solid Films 1993.Google Scholar
7. Aspnes, D.E., in Seraphin, B.O. (ed.) “Optical Properties of Solids: New Developments”, North Holland 1976, p799.Google Scholar
8. Gould, G. and Irene, E.A., J. Electrochem. Soc., 135, 1535 (1988).Google Scholar
9. Hu, Y.Z., Conrad, K.A., Li, M., Andrews, J., Simko, J., and Irene, E.A., Appl. Phys. Lett., 58, 589(1991).Google Scholar
10. Miyake, K., Jpn. J. Appl. Phys., 28, 2376 (1989).Google Scholar