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Ellipsometric Porosimetry of Porous Low-k Films withQuazi-Closed Cavities

Published online by Cambridge University Press:  17 March 2011

Mikhail R. Baklanov ,
Konstantin P. Mogilnikov  and
Jin-Heong Yim
Mikhail R. Baklanov
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Konstantin P. Mogilnikov
Affiliation:
SOPRA, Bois Colombes, France
Jin-Heong Yim
Affiliation:
Samsung Advanced Institute of Technology (SAIT), Kyungki-do, South Korea
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Abstract

Evaluation of quasi-closed cavities connected with air through narrow necksis discussed. These cavities behave as closed pores when they are studied byPositron Annihilation Lifetime Spectroscopy (PALS). The reason is a shortlifetime of o-positronium (Ps) and energy barrier that exist for Psdiffusion from large pores (d>3 nm) to small ones (d<3 nm). It isshown that more comprehensive information can be obtained using adsorptionporosimetry. Standard adsorptives used in adsorption porosimetry haveinfinite lifetime allowing complete penetration and filling all the cavitiesduring the measurement. Calculation of the neck and cavity sizes is based onthe theory of metastable adsorption phases developed by Derjagin, Broekhoffand de Boer (DBdB). Results of evaluation are in good agreement with dataobtained by SEM and TEM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 812: Symposium F – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2004 , 2004 , F5.4
Copyright
Copyright © Materials Research Society 2004

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References

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