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Electro-structural and Film Growth Properties of Room-temperature Deposited Indium-Tin-Oxide on Polymer Substrates

Published online by Cambridge University Press:  11 February 2011

Sung Kyu Park ,
Jeong In Han ,
Dae Gyu Moon ,
Won Keun Kim  and
Min Gi Kwak
Sung Kyu Park
Affiliation:
Information Display Research Center, Korea Electronics Technology Institute, Pyungtaek, Kyunggi, Korea.
Jeong In Han
Affiliation:
Information Display Research Center, Korea Electronics Technology Institute, Pyungtaek, Kyunggi, Korea.
Dae Gyu Moon
Affiliation:
Information Display Research Center, Korea Electronics Technology Institute, Pyungtaek, Kyunggi, Korea.
Won Keun Kim
Affiliation:
Information Display Research Center, Korea Electronics Technology Institute, Pyungtaek, Kyunggi, Korea.
Min Gi Kwak
Affiliation:
Information Display Research Center, Korea Electronics Technology Institute, Pyungtaek, Kyunggi, Korea.
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Abstract

Electrical and structural properties of indium-tin-oxide (ITO) films on flexible polymer substrates were investigated. Room temperature sputtered ITO films on polymer substrates are initially amorphous but become partially crystalline as oxygen partial pressure decreases under 1.5%. The crystallinity shows more (400) and (222) preferentially oriented textures as decreasing of oxygen pressure resulting in lower resistivity. Moreover, an interesting growth property similar to 3D growth mechanism including larger grain size and columnar-like grain structure was also observed. It is considered that the columnar-like grain structure is probably attributed to the poor surface morphology of polymer substrates Based on the experiments, we obtained high performance ITO films on a polycarbonate substrate including 3.8 × 10 –4 Ω-cm in resistivity and transmittance above 80% in the visible ranges at 0.2% oxygen partial pressure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 747: Symposia T/V – Crystalline Oxides on Semiconductors – Interfacial Issues for Oxide-Based Electronics , 2002 , V1.3
Copyright
Copyright © Materials Research Society 2003

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References

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