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Electrostatic-Directed Deposition of Nanoparticles on a Field Generating Substrate

Published online by Cambridge University Press:  01 February 2011

De-Hao Tsai ,
Takumi Hawa ,
Hung-Chih Kan ,
Raymond J Phaneuf  and
Michael R Zachariah
De-Hao Tsai
Affiliation:
NIST, Process Measurements Division, 100 Bureau Dr., Stop 8360, Building 221, Room B358, Gaithersburg, MD, 20899, United States, 301-975-5235, 301-869-5924
Takumi Hawa
Affiliation:
[email protected], University of Maryland, Department of Mechanical Engineering and Department of Chemistry and Biochemistry, College Park, MD, 20742, United States
Hung-Chih Kan
Affiliation:
[email protected], University of Maryland, Department of Material Science and Engineering, College Park, MD, 20742, United States
Raymond J Phaneuf
Affiliation:
[email protected], University of Maryland, Department of Material Science and Engineering, College Park, MD, 20742, United States
Michael R Zachariah
Affiliation:
[email protected], University of Maryland, Department of Mechanical Engineering and Department of Chemistry and Biochemistry, College Park, MD, 20742, United States
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Abstract

In this paper we develop a Brownian dynamics model applied to position metal nanoparticles from the gas phase onto electrostatic-patterns generated by biasing P-N junction substrates. Brownian motion and fluid convection of nanoparticles, as well as the interactions between the charged nanoparticles and the patterned substrate, including electrostatic force, image force and van der Waals force, are accounted for in the simulation. Using both experiment and simulation we have investigated the effects of the particle size, electric field intensity, and the convective flow on coverage selectivity. Coverage selectivity is most sensitive to electric field, which is controlled by the applied reverse bias voltage across the p-n junction. A non-dimensional analysis of the competition between the electrostatic and diffusion force is found to provide a means to collapse a wide range of process operating conditions and an effective indicator or process performance.

Keywords

particulateelectrodepositionsimulation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1059: Symposium KK – Nanoscale Pattern Formation , 2007 , 1059-KK12-03
Copyright
Copyright © Materials Research Society 2008

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References

REFERENCES

1. Kruis, F. E.; Fissan, H.; Peled, A., Synthesis of nanoparticles in the gas phase for electronic, optical and magnetic applications - A review. Journal of Aerosol Science 1998, 29, (5-6), 511–535.Google Scholar
2. Su, K. H.; Wei, Q. H.; Zhang, X.; Mock, J. J.; Smith, D. R.; Schultz, S., Interparticle coupling effects on plasmon resonances of nanogold particles. Nano Letters 2003, 3, (8), 1087–1090.Google Scholar
3. Barry, C. R.; Steward, M. G.; Lwin, N. Z.; Jacobs, H. O., Printing nanoparticles from the liquid and gas phases using nanoxerography. Nanotechnology 2003, 14, (10), 1057–1063.Google Scholar
4. Jacobs, H. O.; Campbell, S. A.; Steward, M. G., Approaching nanoxerography: The use of electrostatic forces to position nanoparticles with 100 nm scale resolution. Advanced Materials 2002, 14, (21), 1553-+.Google Scholar
5. Krinke, T. J.; Deppert, K.; Magnusson, M. H.; Fissan, H., Nanostructured deposition of nanoparticles from the gas phase. Particle & Particle Systems Characterization 2002, 19, (5), 321–326.Google Scholar
6. Tsai, D. H.; Kim, S. H.; Corrigan, T. D.; Phaneuf, R. J.; Zachariah, M. R., Electrostatic-directed deposition of nanoparticles on a field generating substrate. Nanotechnology 2005, 16, (9), 1856–1862.Google Scholar
7. Krinke, T. J.; Deppert, K.; Magnusson, M. H.; Schmidt, F.; Fissan, H., Microscopic aspects of the deposition of nanoparticles from the gas phase. Journal of Aerosol Science 2002, 33, (10), 1341–1359.Google Scholar
8. Schlichting, H., Boundary-Layer Theory. 7th ed.; McGraw Hill: 1979.Google Scholar
9. Kan, H. C.; Phaneuf, R. J., Focusing of low energy electrons by submicrometer patterned structures in low energy electron microscopy. Journal of Vacuum Science & Technology B-an International Journal Devoted to Microelectronics and Nanometer Structures-Processing Measurement and Phenomena 2001, 19, (4), 1158–1163.Google Scholar
10. Ermak, D. L.; Buckholz, H., Numerical-Integration of the Langevin Equation - Monte-Carlo Simulation. Journal of Computational Physics 1980, 35, (2), 169–182.Google Scholar
11. Park, H.; Kim, S.; Chang, H. S., Brownian dynamic simulation for the aggregation of charged particles. Journal of Aerosol Science 2001, 32, (11), 1369–1388.Google Scholar
12. Hind, W. C., Aerosol Technology, 2nd edition. 1998.Google Scholar
13. Phaneuf, R. J.; Kan, H. C.; Marsi, M.; Gregoratti, L.; Gunther, S.; Kiskinova, M., Imaging the variation in band bending across a silicon pn junction surface using spectromicroscopy. Journal of Applied Physics 2000, 88, (2), 863–868.Google Scholar
14. Tsai, D.-H., Hawa, T., Kan, H-C, Phaneuf, R. J., Zachariah, M. R., “Spatial and Size-Resolved Electrostatic-Directed Deposition of Nanoparticles on a Field-Generating Substrate: Theoretical and Experimental Analysis”, Nanotechnology, 18 (36), 365201, 2007.Google Scholar