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Electronic and Chemical Analysis of a Metal-Insulator Interface Utilizing Transmission Electron Energy Loss Spectroscopy at 5Å Spatial Resolution

Published online by Cambridge University Press:  25 February 2011

Michael Scheinfein  and
Michael Isaacson
Michael Scheinfein
Affiliation:
School of Applied and Engineering Physics and National Research and Resource Facility for Submicron Structures, Cornell University, Ithaca, New York 14853
Michael Isaacson
Affiliation:
School of Applied and Engineering Physics and National Research and Resource Facility for Submicron Structures, Cornell University, Ithaca, New York 14853
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Abstract

Using a 0.5 nm diameter probe of 100 keV electrons, we have been able to detect significant changes in the transmission electron energy loss spectra in the region of valence shell and L23 shell excitation within a spatial extent of 0.4 nm of an Al-AlF3 interface. The spectra have been recorded with a dose significantly less than the critical dose for destruction of the AlF3.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 41: Symposium K – Advanced Photon and Particle Techniques for the Characterization of Defects in Solids , 1984 , 343
Copyright
Copyright © Materials Research Society 1985

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