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Electron-Beam-Induced Dissociation of Boron-Deuterium Pairs in Diamond

Published online by Cambridge University Press:  01 February 2011

Julien Barjon ,
Jacques Chevallier ,
François Jomard ,
Céline Baron  and
Alain Deneuville
Julien Barjon
Affiliation:
[email protected], Université de Versailles Saint-Quentin-en-Yvelines, Groupe d'Etude de la Matière Condensée (GEMaC), CNRS, 1 place A. Briand, Meudon, 92195, France
Jacques Chevallier
Affiliation:
[email protected], Université de Versailles Saint-Quentin-en-Yvelines, Groupe d'Etude de la Matière Condensée (GEMaC), CNRS, 1 place A. Briand, Meudon, 92195, France
François Jomard
Affiliation:
[email protected], Université de Versailles Saint-Quentin-en-Yvelines, Groupe d'Etude de la Matière Condensée (GEMaC), CNRS, 1 place A. Briand, Meudon, 92195, France
Céline Baron
Affiliation:
[email protected], CNRS, Laboratoire d'Etudes des Propriétés Electroniques des Solides (LEPES), BP 166, Grenoble, 38042, France
Alain Deneuville
Affiliation:
[email protected], CNRS, Laboratoire d'Etudes des Propriétés Electroniques des Solides (LEPES), BP 166, Grenoble, 38042, France
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Abstract

The diffusion of deuterium in boron-doped homoepitaxial diamond films leads to the passivation of boron acceptors via the formation of B-D pairs. In this letter, the stability of these complexes is investigated under the stress of a low-energy (10keV) electron-beam irradiation at low temperature (∼100K). The dissociation of the complexes is evidenced by cathodoluminescence spectroscopy and is shown to result in the reactivation of most acceptors. The dissociation yield per incident electron is found to be strongly dependent on the e-beam current, which suggests a dissociation involving a vibrational excitation of the complexes by hot electrons.

Keywords

diamondelectrical propertieshydrogenation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 956: Symposium J – Diamond Electronics—Fundamentals to Applications , 2006 , 0956-J04-04
Copyright
Copyright © Materials Research Society 2007

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References

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