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Electron Microscope Observations of Mechanisms of thin Film Delamination from Substrates
Published online by Cambridge University Press: 21 February 2011
Abstract
Transmission electron microscope techniques have been applied to the problem of thin film delamination from substrates during film formation. Model systems involving metal films on single crystal silicon substrates have been used and it is found that delamination of the films is initiated by the formation of damage in the substrate. This understanding removes some of the fundamental problems regarding delamination.
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- Copyright © Materials Research Society 1988
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