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Electron Energy-Loss Spectroscopy in a 400kV Transmission Electron Microscope (TEELS)

Published online by Cambridge University Press:  25 February 2011

T. Oikawa ,
J. Hosoi ,
Y. Kokubo ,
Y. Bando  and
J. L. Lehman
T. Oikawa
Affiliation:
JEOL Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
J. Hosoi
Affiliation:
JEOL Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
Y. Kokubo
Affiliation:
JEOL Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
Y. Bando
Affiliation:
National Institute for Research in Inorganic Materials, 1 Namiki, Sakura, Niihari, Ibaraki 305, Japan
J. L. Lehman
Affiliation:
JEOL (USA) Inc., 11 Dearborn Road, Peabody, MA 01960
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Abstract

Electron energy-loss spectroscopy in the transmission electron microscopy (TEELS) is a powerful technique to investigate the “electron and atom interaction in specimen microareas”.

This paper reports some experimental data of TEELS concerning specimen thickness effect and advantages of 400 kV TEM, and introduces newly developed digital processing of EELS spectra, which is a powerful technique to get the information from the specimen materials.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 62: Symposium Q – Materials Problem Solving with the Transmission Electron Microscope , 1985 , 139
Copyright
Copyright © Materials Research Society 1986

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References

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