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Electron Energy Loss Microspectroscopy: Small Particles in Silicon

Published online by Cambridge University Press:  28 February 2011

W. M. Skiff ,
H. L. Tsai  and
R. W. Carpenter
W. M. Skiff
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287.
H. L. Tsai
Affiliation:
Now at Texas Instruments, Dallas, TX 75265.
R. W. Carpenter
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287.
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Abstract

The method of electron energy loss spectroscopy in a transmission electron microscope is applied to the analysis of small particles in silicon. Elemental and chemical microanalysis is demonstrated on nitrogen and oxygen-associated defects in silicon, using silicon-based standards.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 59: Symposium K – Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon , 1985 , 241
Copyright
Copyright © Materials Research Society 1986

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References

REFERENCES

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