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Electron Emission of Vertically Aligned Carbon Nanotubes Grown on a Large Area Silicon Substrate by Thermal Chemical Vapor Deposition

Published online by Cambridge University Press:  14 March 2011

Cheol J. Lee ,
Jung H. Park ,
Kwon H. Son ,
Dae W. Kim ,
Tae J. Lee ,
Seung C. Lyu ,
Seung Y. Kang ,
Jin H. Lee ,
Hyun K. Park  and
Chan J. Lee
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Cheol J. Lee
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Jung H. Park
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Kwon H. Son
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Dae W. Kim
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Tae J. Lee
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Seung C. Lyu
Affiliation:
School of Electrical Engineering, Kunsan National University, Kunsan 573-701, Korea
Seung Y. Kang
Affiliation:
Microelectronics Lab., Next Generation Semiconductor Dept., ETRI, Taejon 305-350, Korea
Jin H. Lee
Affiliation:
Microelectronics Lab., Next Generation Semiconductor Dept., ETRI, Taejon 305-350, Korea
Hyun K. Park
Affiliation:
Flat display Labs., R&D Center, Samsung Information Display Co., Suwon 442-391, Korea
Chan J. Lee
Affiliation:
Flat display Labs., R&D Center, Samsung Information Display Co., Suwon 442-391, Korea
Jong H. You
Affiliation:
Flat display Labs., R&D Center, Samsung Information Display Co., Suwon 442-391, Korea
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Abstract

We have grown vertically aligned carbon nanotubes on a large area of Co-Ni codeposited Si substrates by thermal chemical vapor deposition using C2H2 gas. The carbon nanotubes grown by the thermal chemical vapor deposition are multi-wall structure, and the wall surface of nanotubes is covered with defective graphite sheets or carbonaceous particles. The carbon nanotubes range from 50 to 120 nm in diameter and about 130 μm in length at 950 °C. Steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically. The turn-on voltage was about 0.8 V/μm with a current density of 0.1 μA/cm2 and emission current reveals the Fowler-Nordheim mode.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 621: Symposia Q/R – Electron-Emissive Materials, Vacuum Microelectronics… , 2000 , R5.14.1
Copyright
Copyright © Materials Research Society 2000

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References

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