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Electron Diffraction Study of Multilayer Structures with Partially Coherent Illumination

Published online by Cambridge University Press:  25 February 2011

N. Otsuka ,
C. Choi ,
L. A. Kolodziejski  and
R. L. Gunshor
N. Otsuka
Affiliation:
Purdue University, W. Lafayette, IN 47907
C. Choi
Affiliation:
Purdue University, W. Lafayette, IN 47907
L. A. Kolodziejski
Affiliation:
Purdue University, W. Lafayette, IN 47907
R. L. Gunshor
Affiliation:
Purdue University, W. Lafayette, IN 47907
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Abstract

The effect of partial coherency on electron diffraction patterns of Cd1−xMnxTe – Cd1−yMny Te superlattices has been investigated. Observed diffraction patterns are compared with intensity calculations performed using dynamical diffraction theory with a model of an extended incoherent monochromatic source. From this study, a new method of electron diffraction for characterization of multilayer structures can be developed. Under the condition that the lateral coherent distance of the incident beam covers two adjacent layers, diffraction beams arising from the two layers give rise to an interference fringe in a diffraction spot. With this type of diffraction pattern, one can determine the refractive index of a crystal in the multilayer structure.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 62: Symposium Q – Materials Problem Solving with the Transmission Electron Microscope , 1985 , 65
Copyright
Copyright © Materials Research Society 1986

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References

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