Hostname: page-component-78c5997874-fbnjt Total loading time: 0 Render date: 2024-11-20T01:45:20.700Z Has data issue: false hasContentIssue false
  • English
  • Français

Electron Diffraction Investigation of Crystallographic Texture of Thin Films

Published online by Cambridge University Press:  10 February 2011

Li Tang ,
Shanlin Duan  and
David E. Laughlin
Li Tang
Affiliation:
IBM, Storage Systems Division, 5600 Cottle Road, N76/050, San Jose, CA 95193
Shanlin Duan
Affiliation:
IBM, Storage Systems Division, 5600 Cottle Road, N76/050, San Jose, CA 95193
David E. Laughlin
Affiliation:
Data Storage Systems Center and Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, PA 15213
Get access

Abstract

A method of investigating thin film crystallographic texture by electron diffraction is reviewed. The reciprocal lattices of fibrous and lamellar textured thin films are spherical belts around the texture axis. Equations describing the projection of the spherical belts onto the Ewald sphere along the texture axis direction are presented. Based on these equations the geometric and intensity evolution of the electron diffraction patterns with the tilt angle about an arbitrary axis in the film plane can be analyzed in a systematic way. The geometric characteristics of the electron diffraction patterns are then used to derive the texture axis directional index and its angular distribution. The way to determine the equal-intensity circular arcs on the diffraction pattern is also discussed. This method can be applied to both single layered and multilayered thin films of various applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 562: Symposium L – Polycrystalline Metal & Magnetic Thin Films , 1999 , 105
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tang, L. and Laughlin, D.E., J. Appl. Cryst. 29, p. 411 (1996).Google Scholar
2. Lu, B., Tang, L., Lambeth, D. N., and Laughlin, D. E., Proc. International Conference on Grain Growth, Ed. A., Weiland, B., Adams, and A., Rollet, TMS, Warrendole, PA, p. 529 (1998).Google Scholar
3. Vainshtein, B. K., Structure Analysis by Electron Diffraction, Pergamon, New York, 1964, p.70.Google Scholar
4. Read, M. H. and Altman, C., Appl. Phys. Lett. 7, p.51 (1965).Google Scholar
5. Tang, L., Feng, Y. C., Lee, L. L., and Laughlin, D. E., J. Appl. Cryst. 29, p. 419 (1996).Google Scholar
6. Laughlin, D. E., Tang, L., Lee, L. L., Hsu, Y. N., and Lambeth, D. N., Mat. Res. Soc. Symp. Proc., 475, p. 107 (1997).Google Scholar
7. Tang, L., Laughlin, D. E., Lambeth, D. N., and Doerner, M. F., J. Appl. Phys. 79, p.5348 (1996).Google Scholar
8. Tang, L., Laughlin, D. E., and Gangopadhyay, S., J. Appl. Phys. 81, p.4906 (1997).Google Scholar