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Electroactive Polymer Based Micro-ElectroMechanical System as Biosensor Platform

Published online by Cambridge University Press:  01 February 2011

Zhimin Li ,
Suiqiong Li  and
Z.-Y. Cheng
Zhimin Li
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
Suiqiong Li
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
Z.-Y. Cheng
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
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Abstract

A micro-electromechanical diaphragm (MEMD) as micro-sensor platform is introduced. The performance of a MEMD is compared with that of a microcantilever (MC). It is theoretically found that the sensitivity of a MEMD is about 50 times higher than that of a MC. The measured resonance frequencies in air proved the validity of the MEMD design. More importantly, the quality merit factor (Q value) of MEMD is higher than that of MC. The damping effect of liquid medium on a MEMD is much smaller than on a MC. It is experimentally demonstrated that the MEMD works well in both air and liquid.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 855: Symposium W – Mechanically Active Materials , 2004 , W3.26
Copyright
Copyright © Materials Research Society 2005

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