Published online by Cambridge University Press: 15 February 2011
Although coherent twin boundaries in silicon are electrically inactive, dislocations in the boundaries can act as efficient recombination centers for minority carriers. Different twin boundary dislocation arrangements have been studied by EBIC and TEM. It is found that the observed EBIC contrast is dependent not only on the arrangement of the dislocations in the boundaries but also on the inclination of the boundaries to the surface. It is shown that different defect configurations can produce similar EBIC contrast.