Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-25T06:23:25.207Z Has data issue: false hasContentIssue false
  • English
  • Français

Elastic Properties of CVD Diamond Via Dynamic Resonance Measurements

Published online by Cambridge University Press:  15 February 2011

Mark P. D'Evelyn ,
David E. Slutz  and
Bradley E. Williams
Mark P. D'Evelyn
Affiliation:
General Electric Corporate Research and Development, P.O. Box 8, Schenectady, NY 12301
David E. Slutz
Affiliation:
General Electric Superabrasives, P.O. Box 568, Worthington, OH 43085
Bradley E. Williams
Affiliation:
General Electric Superabrasives, P.O. Box 568, Worthington, OH 43085
Get access

Abstract

Control of the mechanical properties of CVD diamond is essential to achieve optimal performance in various applications. While several methods have been applied to the measurement of the Young's modulus of thick-film CVD diamond, in general these methods are not suitable for diamond characterization on a production scale. In addition, many of these methods cannot determine the shear modulus (or Poisson's ratio), which is necessary for a complete description of the elastic properties. We have developed a simple dynamic resonance method for determining both the Young's and shear modulus of free-standing CVD diamond in the shape of rectangular plates or round disks. The specimen is supported along nodal lines of flexural or torsional modes. Oscillations induced by impact from a falling ceramic bead are sensed by a microphone, and the resonant frequencies are determined by a signal analyzer. The Young's and shear modulus are calculated from the frequencies of the fundamental flexural and torsional modes, respectively, using quasi-analytic formulas. CVD diamond grown by several methods routinely achieves Young's and shear modulus values above 1000 GPa and 500 GPa, respectively, in good accord with theoretical values for pure polycrystalline diamond.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 115
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. For example, Kosky, P. G., Rev. Sci. Instrum. 64, 1071 (1993).Google Scholar
2. Cardinale, G. F. and Tustison, R. W., J. Vac. Sci. Technol. A 9, 2204 (1991).Google Scholar
3. Windischmann, H. and Epps, G. F., Diamond Relat. Mater. 1, 656 (1992).Google Scholar
4. Klein, C. A. and Cardinale, G. F., Diamond Relat. Mater. 2, 918 (1993).Google Scholar
5. Valentine, T. J., Whitehead, A. J., Sussman, R. S., Wort, C. J. H., and Scarsbrook, G. A., Diamond Relat. Mater. 3, 1168 (1994).Google Scholar
6. Young, W. C., Roark's Formulas for Stress and Strain, 6th Edition (McGraw-Hill, New York, 1989) p. 429.Google Scholar
7. Beetz, C. P. Jr, Cooper, C. V., and Perry, T. A., J. Mater. Res. 5, 2555 (1990).Google Scholar
8. McHargue, C., in Applications of Diamond Films and Related Materials, ed. Tzeng, Y., Yoshikawa, M., Murakawa, M., and Feldman, A. (Elsevier, Amsterdam, 1991) p. 113.Google Scholar
9. Savvides, N. and Bell, T. J., J. Appl. Phys. 72, 2791 (1992).Google Scholar
10. Dunn, K. and Bundy, F., J. Appl. Phys. 49, 5865 (1978).Google Scholar
11. Gray, K. J., SPIE Diamond Optics V, 1759, 203 (1992).Google Scholar
12. Chandra, L. and Clyne, T. W., J. Mater. Sci. Lett. 12, 191 (1993).Google Scholar
13. Schrieber, E., Anderson, O. L., and Soga, N., Elastic Constants and Their Measurement, (McGraw-Hill, New York, 1974), pp. 82–125.Google Scholar
14. Spinner, S. and Tefft, W. E., Am. Soc. Test. Mater. Proc. 61, 1221 (1961).Google Scholar
15. “Standard Test Method for Dynamic Young's Modulus, Shear Modulus, and Poisson's Ratio for Advanced Ceramics by Impulse Excitation of Vibration,” ASTM Standard C 1259–94 (ASTM, Philadelphia, PA, 1994)..Google Scholar
16. Glandus, J. C., “Rupture fragile et résistance aux chocs thermiques de céramiques à usages mécaniques,” Ph.D. Dissertation, University of Limoges (1981, unpublished).Google Scholar
17. “Synthesis of the elastic formulas for discs by J. C. Glandus,” Private communication to MPD by Lemmens, J. W., Inc. (St. Louis, Missouri, USA).Google Scholar
18. GrindoSonic, J. W. Lemmens, Inc. (St. Louis, Missouri, USA).Google Scholar
19. Pickett, G., Am. Soc. Test. Mater. Proc. 45, 846 (1945).Google Scholar
20. Spinner, S., Reichard, T. W., and Tefft, W. E., J. Res. Natl. Bur. Stand. 64B, 237 (1960).Google Scholar
21. Smith, J. S., Wyrick, M. D., and Poole, J. M., Dynamic Elastic Modulus Measurement in Materials, ed. by Wolfenden, A., ASTM STP 1045 (ASTM, Philadelphia, PA, 1990).Google Scholar
22. Werner, M., Hein, S., and Obermeier, E., Diamond Relat. Mater. 2, 939 (1993).Google Scholar