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Effects of Hydrogen on Nucleation of Islands During Si(001) Mbe Growth

Published online by Cambridge University Press:  15 February 2011

Kazuki Mizushima ,
Pavel Šmilauer  and
Dimitri D. Vvedensky
Kazuki Mizushima
Affiliation:
Central Research Institute, Mitsubishi Materials Corporation, Omiya, Saitama 330, Japan
Pavel Šmilauer
Affiliation:
HLRZ, KFA Jülich, 52425 Jülich, Germany and Institute of Physics, Cukrovarnická 10, 162 00 Praha 6, Czech Republic
Dimitri D. Vvedensky
Affiliation:
The Blackett Laboratory, Imperial College, London SW7 2BZ, United Kingdom
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Abstract

Kinetic Monte Carlo simulations with two species (Si and H) have been performed to identify the mechanism behind the H-induced creation of a strongly temperature-dependent high density of Si islands in the temperature range of 300–550 K during molecular-beam epitaxy on Si(001) surface. A model is proposed to explain this effect as a result of an activated exchange between H and Si at Si island edges.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 440: Symposia CA – Structure and Evolution of Surfaces , 1996 , 141
Copyright
Copyright © Materials Research Society 1997

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References

1. Vasek, J.E., Zhang, Z., Salling, C.T., and Lagally, M.G., Phys. Rev. B 51, 17207 (1995).Google Scholar
2. Weeks, J.D. and Gilmer, G.H., Adv. Chem. Phys. 40, 157 (1979).Google Scholar
3. Elswijk, H.B., Hoeven, A.J., Loenen, E.J. van, and Dijkkamp, D., J. Vac. Sci. Technol. B 9, 451 (1991).Google Scholar
4. Kirkpatrick, S., in Les Houches Summer School on Ill-Condensed Matter, ed. Ballian, R., Maynard, R., and Toulouse, G. (North Holland, Amsterdam 1979), p. 324.Google Scholar
5. Mo, Y.-W., Kleiner, J., Webb, M.B., and Lagally, M.G., Phys. Rev. Lett. 66, 1998 (1991).Google Scholar
6. Pearson, C., Krueger, M., and Ganz, E., Phys. Rev. Lett. 76, 2306 (1996).Google Scholar
7. Vittadini, A., Selloni, A., and Casarin, M., Surf. Sci. Lett. 289, L625 (1993).Google Scholar
8. Kandel, D., preprint (1996).Google Scholar
9. Zhang, J., Lees, A.K., Taylor, A.G., Xie, M.H., Raisbeck, D., Joyce, B.A., Sobiesierski, Z., and Westwood, D.I., preprint (1996).Google Scholar