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Effects of Deposition Parameters on the Structure and Photovoltaic Performance of Si Thin Films by Metal Induced Growth

Published online by Cambridge University Press:  21 March 2011

Peter T. Mersich
Affiliation:
Department of Electrical Engineering, University at Buffalo, State University of New York, Buffalo, NY 14260, U.S.A
Shubhranshu Verma
Affiliation:
Department of Electrical Engineering, University at Buffalo, State University of New York, Buffalo, NY 14260, U.S.A
Wayne A. Anderson
Affiliation:
Department of Electrical Engineering, University at Buffalo, State University of New York, Buffalo, NY 14260, U.S.A
Rossman F. Giese Jr.
Affiliation:
Department of Geology, University at Buffalo, State University of New York, Buffalo, NY 14260, U.S.A.
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Abstract

A metal-induced growth (MIG) process was employed to deposit thin films of microcrystalline silicon (μc-Si) for solar cell applications. Due to different grain orientations of the crystals, the absorption coefficient of μc-Si is about 10 times higher than the absorption coefficient of single crystalline Si. The properties of the Si film were investigated resulting from variations in several parameters. A range of Ni and Co thicknesses were examined from 7.5 nm to 60 nm including combinations of the two, while the dc sputtering power was stepped up from 150 W to 225 W. The structure of the resulting film was studied using scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS) and x-ray diffraction (XRD). SEM of the film revealed that 5 hr of Si deposition at 150 W yields a film thickness of 6.5 μm and a maximum grain size of about 0.6 μm. EDS data showed that at the middle of the Si film the atomic percentage of the Si was 99.17%. XRD data showed that the dominant crystal orientation is {220}. To characterize the photovoltaic properties of the μc-Si, Schottky photodiodes were fabricated. Ni alone as the seed layer resulted in ohmic behavior. With Co only, MIG formed a rectifying contact with open-circuit voltage (V∝). The combination of Co layered over Ni formed better thin films and gave a Voc of 0.24 V and short-circuit current density (Jsc) of 5.0 mA/cm2 since the Co prevents Ni contamination of the top of the grown Si layer.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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References

1. Hegedus, S., Prog. Photovoltaics 14 (5), 393411 (2006).Google Scholar
2. Meier, J., Fluckiger, R., Keppner, H., Shah, A., Appl.Phys. Lett. 65 (7), 860862 (1994).Google Scholar
3. Rath, J.K., Sol. Energy Mater. Sol. Cells 76 (4), 431487 (2003).Google Scholar
4. Ji, C.H., Anderson, W.A., IEEE Trans. Electron Devices 60 (9), 18851889 (2003).Google Scholar
5. Choi, J.H., Kim, D.Y., Kim, S. S., Park, S.J., Jang, J., Thin Solid Films 440 (1-2), 14 (2003).Google Scholar
6. Hayzelden, C., Batstone, J.L., Cammarata, R.C., Appl. Phys. Lett. 60 (2), 225227 (1992).Google Scholar
7. Bulle-Lieuwma, C.W.T., Ommen, A.H. van, IJzendoorn, L.J. van, Appl. Phys. Lett. 54 (3), 244246 (1989).Google Scholar