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Effectiveness of an Inwardly Fired Burner on Abatement of PFCs
Published online by Cambridge University Press: 10 February 2011
Abstract
A successful method for abating PFC (perfluorinated compounds) emissions from semiconductor manufacture is presented. The method involves use of a novel thermal technique combining an inwardly fired burner with a built-in wet scrubber for removal of combustion products. The Edwards High Vacuum Thermal Processor Unit (TPU) is a Point of Use abatement device designed to destroy PFC and process gases.
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- Research Article
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- Copyright © Materials Research Society 1997
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