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Effect of Pb Content on the Transformation of Sputtered PbxZr0.4Ti0.6O3 ThinFilm

Published online by Cambridge University Press:  15 February 2011

Jae-Hyun Joo ,
Deok-Sin Kill  and
Seung-Ki Joo
Jae-Hyun Joo
Affiliation:
Department of Metallurgical Engineering, Seoul National University, Seoul Korea
Deok-Sin Kill
Affiliation:
Department of Metallurgical Engineering, Seoul National University, Seoul Korea
Seung-Ki Joo
Affiliation:
Department of Metallurgical Engineering, Seoul National University, Seoul Korea
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Abstract

PZT (PbxZr0.4Ti0.6O3) thin filmswere prepared by reactive co-sputtering and annealed by RTA (Rapid ThermalAnnealing). Transformation kinetics and effect of Pb content on thetransformation were intensively studied using EMA (Effective MediumApproximation). It has been found that depending on Pb content as well asRTA temperature, the crystal structure of PZT films changed greatly. Itturned out that the transformation temperature for the perovskite phase canbe lowered and the width of transition temperature region was reduced byincreasing Pb content in the films. Dependence of transformation path on thePb content has been studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 321: Symposium E – Crystallization and Related Phenomena in Amorphous Materials—Ceramics, Metals, Polymers, and Semiconductors , 1993 , 591
Copyright
Copyright © Materials Research Society 1994

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References

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