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Effect of Oxygen and Nitrogen Doping on Mechanical Properties of Silicon Using Nanoindentation

Published online by Cambridge University Press:  15 March 2011

A. Karoui ,
G. Rozgonyi  and
T. Ciszek
A. Karoui
Affiliation:
Materials Science and Engineering Dept.North Carolina State University, Raleigh, NC 27695-7916
G. Rozgonyi
Affiliation:
Materials Science and Engineering Dept.North Carolina State University, Raleigh, NC 27695-7916
T. Ciszek
Affiliation:
National Renewable Energy Laboratory, Golden, CO
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Abstract

The effects of oxygen and nitrogen on the mechanical properties of Czochralski (CZ) and float zone silicon have been studied using nano-indentation. Nitrogen free FZ Si exhibited low hardness of 6.49 GPa and elastic modulus of 104 GPa. When doped with 2×1015cm−3 nitrogen, FZ Si hardness and elastic modulus increased to 8.2 and 182 GPa, respectively. In the near-surface denuded zone of N-doped CZ Si (N-CZ) the hardness correlates well with the O and N profiles. Distinct high hardness points, found in the O- and N- rich subsurface region, were attributed to precipitates. Nano-scratch tests of N-CZ Si confirmed the existence of hard phases, mostly small precipitates, whose density, estimated to be 2×1013cm−3, is in the range of previously suggested nuclei density in as-grown N-CZ silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 821: Symposium P – Nanoscale Materials & Modeling-Relations Among Processing, Microstructure and Mechanical Properties , 2004 , P8.36
Copyright
Copyright © Materials Research Society 2004

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