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Effect of growth temperature on the microstructure of the nucleation layers of GaN grown by MOCVD on (1120) sapphire

Published online by Cambridge University Press:  11 February 2011

T. Wojtowicz ,
P. Ruterana ,
M. E. Twigg ,
R. L. Henry ,
D. D. Koleske  and
A. E. Wickenden
T. Wojtowicz
Affiliation:
LERMAT, ISMRA, 6 Bd Maréchal Juin, 14050 Caen, France
P. Ruterana*
Affiliation:
LERMAT, ISMRA, 6 Bd Maréchal Juin, 14050 Caen, France
M. E. Twigg
Affiliation:
Electronics Science and Technology Division, Naval Research Laboratory, Washington, D.C., 20375–5320, USA
R. L. Henry
Affiliation:
Electronics Science and Technology Division, Naval Research Laboratory, Washington, D.C., 20375–5320, USA
D. D. Koleske
Affiliation:
Electronics Science and Technology Division, Naval Research Laboratory, Washington, D.C., 20375–5320, USA
A. E. Wickenden
Affiliation:
Electronics Science and Technology Division, Naval Research Laboratory, Washington, D.C., 20375–5320, USA
*
* Tel 33 2 31 45 26 53 Fax 33 2 31 45 26 60 email [email protected]
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Abstract

Most of the work done on GaN has taken into account layers grown on the (0001) sapphire plane. However one would expect the growth on the (1120) plane to lead to different structural defects. As has been shown, in one direction, the mismatch is rather small. In this work, we have carried out structural analysis of nucleation layers grown at temperatures ranging from 600°C to 1100°C. It is shown that for many of the structural parameters, such as the orientation relationships, the layer morphology and the nucleation mechanism critically depend on the growth temperature. At the lowest temperatures, the growth is completely three dimensional with a mixture of the two traditional orientation relationships, but the coalescence thickness is small. In a next step, the A orientation relationship predominates and the layer roughness tends to slightly decrease. This orientation is never perfect, and there is always 1.5° misorientation to the same direction in sapphire, whereas the B orientation is always perfect. At an intermediate temperature, island growth is predominant, whereas towards the high temperature end the B orientation becomes predominant. For the highest growth temperatures, the nucleated layers are completely flat and with the B orientation, although they contain a quite large number of defects such as inversion domains.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 743: Symposium L – GaN and Related Alloys , 2002 , L3.19
Copyright
Copyright © Materials Research Society 2003

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Footnotes

2

Sandia National Laboratories, Albuquerque, NM 87185

3

Army Research Laboratoy, Adelphi, MD 20783

References

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