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The Effect of Anodization Time on the Properties of TiO2 Nanotube Humidity Sensors

Published online by Cambridge University Press:  14 December 2012

Reshmi Raman ,
Oscar A. Jaramillo  and
Marina E. Rincón
Reshmi Raman
Affiliation:
CIE-UNAM, Priv. Xochicalco S/N, Col. Centro, Temixco, Mor. 62580
Oscar A. Jaramillo
Affiliation:
CIE-UNAM, Priv. Xochicalco S/N, Col. Centro, Temixco, Mor. 62580
Marina E. Rincón*
Affiliation:
CIE-UNAM, Priv. Xochicalco S/N, Col. Centro, Temixco, Mor. 62580
*
*Corresponding author: [email protected]
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Abstract

In this paper, the effect of anodization time on the properties of TiO2 nanotube humidity sensors is reported. TiO2 nanotube arrays were grown by anodization of Ti foil using diethylene glycol and ammonium fluoride. Highly ordered TiO2 nanotube arrays were obtained, with the length of tube increasing from 4 to 20 μm as the time of anodization increases, at the expense of nanotube integrity. Humidity sensors based on TiO2 nanotube arrays were fabricated in impedance mode with ITO as top contact. The results revealed that sensor performance does not correlate with anodization time, regardless of enhanced area, showing an optimum morphology at 4h and 10h. The increase resistivity of the sensors upon water exposure, a donor molecule, is explained by the lack of TiO2 stoichiometry and the fluctuations in the concentration of oxygen vacancies.

Keywords

sensornanostructuremorpholoy
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1479: Symposium S – Nanostructured Materials and Nanotechnology—2012 , 2012 , pp. 83 - 88
Copyright
Copyright © Materials Research Society 2012

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