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Dynamical Modeling of Laser ablation Processes

Published online by Cambridge University Press:  21 February 2011

J. N. Leboeuf ,
K. R. Chen ,
J. M. Donato ,
D. B. Geohegan‡ ,
C. L. Liu ,
A. A. Puretzky  and
R. F. Wood ‡
J. N. Leboeuf
Affiliation:
Fusion Energy Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
K. R. Chen
Affiliation:
Fusion Energy Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
J. M. Donato
Affiliation:
Computer Science and Mathematics Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
D. B. Geohegan‡
Affiliation:
Solid State Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
C. L. Liu
Affiliation:
Solid State Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
A. A. Puretzky
Affiliation:
Solid State Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
R. F. Wood ‡
Affiliation:
Solid State Division Oak Ridge National Laboratory, Oak Ridge, TN 37831-8071
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Abstract

Several physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed laser deposition of materials. these include thermal models of laser-solid target interactions that initiate the vapor plume; plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms; gas dynamic, hydrodynamic, and collisional descriptions of plume transport; and molecular dynamics models of the interaction of plume particles with the deposition substrate. the complexity of the phenomena involved in the laser ablation process is matched by the diversity of the modeling task, which combines materials science, atomic physics, and plasma physics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 388: Symposium Q – Film Synthesis and Growth Using Energetic Beams , 1995 , 3
Copyright
Copyright © Materials Research Society 1995

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References

1 T.Cheung, J., Pulser Laser Deposition of Thin Films, ed. Chrisey, D. B. and Hubler, G. K. (Wiley, New York ,1994) pp. 1–22.Google Scholar
2 Geohegan, D. B., Puretzky, A. A., Leboeuf, J. N., Chen, K. R., Liu, C. L., Wood, R. F., Donato, J. M., and Lowndes, D., Paper in these proceedings.Google Scholar
3 Geohegan, D. B., Appl. Phys. Lett. 60, 2732 (1992).Google Scholar
4 Wood, R. F. and Geist, G. A., Phys. Rev. Lett. 57, 873 (1986).Google Scholar
5 Wood, R. F. and Geist, G. A., Phys. Rev. B34, 2606 (1986).Google Scholar
6 Anders, A., A Formulary for Plasma Physics (Akademie-Verlag, Berlin, 1990), pp. 159–187.Google Scholar
7 Johnston, T. W., and Dawson, J. M., Phys. Fluids 16, 722 (1973).Google Scholar
8 Liu, C. L., Leboeuf, J. N., Wood, R. F., Geohegan, D. B., Donato, J. M., Chen, K. R., and Puretzky, A. A., Paper in these proceedings.Google Scholar
9 Rosen, D.I., Mitteldorf, J., Kothandaraman, G., Pirri, A. N., and Pugh, E. R., J. appl. Phys. 53, 3190 (1982).Google Scholar
10 Zel’dovich, Y A. B., and Raizer, Yu. P., Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (Academic Press, New York and London, 1966).Google Scholar
11 Sod, G. A., Journ. Comput. Phys 27, 1 (1978).Google Scholar
12 Liu, C. L., Leboeuf, J. N., Wood, R. F., Geohegan, D. B., Donato, J. M., Chen, K. R., and Puretzky, A. A., Beam-Solid interactions for Materials Synthesis and Characterization. ed. Luzzi, D. E., Heinz, T. F., Iwaki, M., Jacobson, D. C. (Mater. Res. Soc. Proc. 351, Boston, Mass., 1994).Google Scholar
13 Leboeuf, J. N., Tajima, T., and Dawson, J. M., Journ. Comput. Phys 31, 379 (1979).Google Scholar
14 Brunel, F., Leboeuf, J. N., Tajima, T., Dawson, J. M., Makino, M., and Kamimura, T., Journ. Comput. Phys. 43, 268 (1981).Google Scholar
15 Vertes, A., Juhasz, P., Wolf, M. D., and Gijbels, R., Scanning Microscopy 2, 1853 (1988).Google Scholar
16 Balazs, L., Gijbels, R., and Vertes, A., Analytical Chemistry 63, 314 (1991).Google Scholar
17 Chen, K. R., Leboeuf, J. N., Geohegan, D. B., Donato, J. M., Wood, R. F., and Liu, C. L., Paper in these proceedings.Google Scholar
18 Rambo, P. W., and Denavit, J., Journ. Comput. Phys. 98, 317 (1992).Google Scholar
19 Koopman, D. W., and Goforth, R. R., Phys. Fluids 17, 1560 (1974).Google Scholar