Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Achard, H.
and
Mace, H.
1995.
Science and Technology of Electroceramic Thin Films.
p.
353.
Chung, Chee Won
Lee, Wan In
and
Lee, June Key
1995.
Dry etching of Pt/PbZrxTi1−xO3/Pt thin film capacitors in an inductively coupled plasma (ICP).
Integrated Ferroelectrics,
Vol. 11,
Issue. 1-4,
p.
259.
Chung, Chee Won
Song, Inyong
and
Lee, Jong Sig
1997.
Investigation of ETCH Profiles in Etching of PZT and Pt Thin Films.
MRS Proceedings,
Vol. 493,
Issue. ,
Farrell, Curtis E.
Milkove, K. R.
Wang, Cindy
and
Kotecki, David E.
1997.
A reactive ion etch study for producing patterned platinum structures.
Integrated Ferroelectrics,
Vol. 16,
Issue. 1-4,
p.
109.
Chung, Chee Won
1998.
Reactive ion etching of Pb(ZrxTi1−x)O3 thin films in an inductively coupled plasma.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Vol. 16,
Issue. 4,
p.
1894.
Park, Chanro
Cho, Jun Hee
Choi, Chang Ju
Seol, Yeo Song
and
Choi, Il Hyun
1998.
Dry Etching of PZT Films with CF4/Ar High Density Plasma.
MRS Proceedings,
Vol. 541,
Issue. ,
Suchaneck, G.
Tews, R.
and
Gerlach, G.
1999.
A model for reactive ion etching of PZT thin films.
Surface and Coatings Technology,
Vol. 116-119,
Issue. ,
p.
456.
Baborowski, J.
Muralt, P.
Ledermann, N.
Colla, E.
Seifert, A.
Gentil, S.
and
Setter, N.
2000.
Mechanisms of Pb(zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor.
Integrated Ferroelectrics,
Vol. 31,
Issue. 1-4,
p.
261.
Chung, Chee Won
Byun, Yo Han
and
Kim, Hye In
2002.
Inductively coupled plasma etching of a Pb(ZrxTi1−x)O3 thin film in a HBr/Ar plasma.
Microelectronic Engineering,
Vol. 63,
Issue. 4,
p.
353.
Chung, Chee Won
Byun, Yo Han
and
Kim, Hye In
2002.
Inductively coupled plasma etching of Pb(ZrxTi1-x)O3 thin films in Cl2/C2F6/Ar and HBr/Ar plasmas.
Korean Journal of Chemical Engineering,
Vol. 19,
Issue. 3,
p.
524.
Lim, Kyu-Tae
Kim, Kyoung-Tae
Kim, Dong-Pyo
and
Kim, Chang-II
2003.
Etch characteristics of Bi4−xEuxTi3O12 (BET) thin films using inductively coupled plasma.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
Vol. 21,
Issue. 4,
p.
1475.
Kathiresan, M.
Jose, Jain
Varadarajan, E.
Ramesh, R.
Natarajan, V.
Jayaraj, M. K.
and
Santhanakrishnan, T.
2020.
Optimization of piezoelectric MEMS process on Sr and La co-doped PZT thin films.
Journal of Advanced Dielectrics,
Vol. 10,
Issue. 04,
p.
2050010.