Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-25T15:16:51.495Z Has data issue: false hasContentIssue false
  • English
  • Français

Dome-like PVDF Actuators: Preparation, Phase Transformation and Piezoelectric Properties

Published online by Cambridge University Press:  31 January 2011

Michael Wegener ,
Robert Schwerdtner ,
Martin Schueller  and
Andreas Morschhauser
Michael Wegener
Affiliation:
[email protected], Fraunhofer IAP, Functional Materials and Devices, Potsdam, Germany
Robert Schwerdtner
Affiliation:
[email protected], Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, Germany
Martin Schueller
Affiliation:
[email protected], Fraunhofer ENAS, Multi Device Integration, Chemnitz, Germany
Andreas Morschhauser
Affiliation:
[email protected], Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, Germany
Get access

Abstract

In this work, dome structures in PVDF films were prepared as ultrasonic transducer. The domes are realized by a deep-drawing process. The dome-forming process leads to a phase transformation from the non-polar α into the polar β phase within dome wall and roof of the PVDF films. A ferroelectric polarization is obtained in these dome areas after suitable electrical poling which yields a piezoelectric activity. Because of the piezoelectric activity within the film plane, a dome-roof up-and-down actuation is observed with resonance frequencies in the range between 65 and 93 kHz.

Keywords

piezoelectricpolymeractuator
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1190: Symposium NN – Active Polymers , 2009 , 1190-NN08-03
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Furukawa, T., Structure and properties of ferroelectric polymers, Key Engineering Materials 92-93, 15–30 (1994).Google Scholar
[2] Nalwa, H.S. (Ed.), Ferroelectric polymers, Marcel Dekker Inc., New York (1995).10.1201/9781482295450Google Scholar
[3] Wegener, M. and Bauer, S., Microstorms in cellular polymers: A route to soft piezoelectric transducer materials with engineered macroscopic-dipoles, ChemPhysChem 6, 1014–1025 (2005).Google Scholar
[4] Bauer, S., Piezo- pyro- and ferroelectrets: Soft transducer materials for electromechanical energy conversion, IEEE Trans. Dielectr. Electr. Insul. 13 (5), 953–962 (2006).Google Scholar
[5] Wegener, M., Ferroelectrets – Cellular piezoelectric polymers, in: New Materials for Microscale Sensors and Actuators – An Engineering Review, Edited by Wilson, S. and Bowen, C., Materials Science and Engineering: R: Reports 56, 78–83 (2007).Google Scholar
[6] Daβler, H., Mikromechanische realisierte PVDF-Ultraschallwandler-Arrays für Anwendungen in Flüssigkeiten, PhD-thesis (in German), Chemnitz University of Technology (2002).Google Scholar
[7] Kim, H.-J., Lee, H., and Ziaie, B., A wideband PVDF-on-silicon ultrasonic transducer array with microspheres embedded low melting temperature alloy backing, Biomed Microdevices 9, 83–90 (2007).Google Scholar
[8] Ohigashi, H., Electromechanical properties of polarized polyvinylidene fluoride films as studied by the piezoelectric resonance method, J. Appl. Phys. 47 (3), 949–955 (1976).Google Scholar
[9] Dickens, B., Balizer, E., DeReggi, A.S., and Roth, S.C., Hysteresis measurements of remanent polarization and coercive field in polymers, J. Appl. Phys. 72 (9), 4258–4264 (1992).Google Scholar
[10] Wegener, M., Polarization – electric field hysteresis of ferroelectric PVDF films: Comparison of different measurement regimes, Rev. Sci. Instr. 79, 106103 (2008).Google Scholar
[11] Kobayashi, M., Tashiro, K., and Tadokoro, H., Molecular vibrations of three crystal forms of poly(vinylidene fluoride), Macromolecules 8, 158–170 (1975).Google Scholar