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A Dodson-Tsao Relaxation Approach to The Crystallographic Tilting In (100) Heteroepitaxial Systems
Published online by Cambridge University Press: 15 February 2011
Abstract
The tilt of epilayer lattice planes in (100) zinc blende lattice-mismatched heterostructures is calculated numerically using the Dodson-Tsao plastic relaxation model. Tilt is calculated as a function of growth temperature, initial defect density and substrate miscut angle. The results are explained by looking at the time evolution of the excess stresses of the opposing slip systems during strain relaxation.
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- Copyright © Materials Research Society 1995