Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-25T15:20:59.979Z Has data issue: false hasContentIssue false
  • English
  • Français

Direct-Write Micro- and Nanostructuring with Femtosecond Lasers

Published online by Cambridge University Press:  01 February 2011

B. N. Chichkov ,
J. Koch ,
A. Ovsianikov ,
S. Passinger ,
C. Reinhardt  and
J. Serbin
B. N. Chichkov
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
J. Koch
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
A. Ovsianikov
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
S. Passinger
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
C. Reinhardt
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
J. Serbin
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
Get access

Abstract

Our recent progress in the direct-write femtosecond laser material processing technologies, nanostructuring, and fabrication of photonic devices is reviewed. Special attention is given to the sub-wavelength microstructuring of metals and two-photon polymerization (2PP) technique. Formation of microbumps and nanojets on thin metal films under single pulse laser irradiation is discussed. Microstructuring of different photosensitive materials by 2PP technique is demonstrated. Numerous applications of this technology for the fabrication of 3d structures, waveguides, photonic crystals, etc. are studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 850: Symposium MM – Ultrafast Lasers for Materials Science , 2004 , MM2.5
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Korte, F., Serbin, J., Koch, J., Egbert, A., Fallnich, C., Ostendorf, A., and Chichkov, B.N., Appl. Phys. A 77, 229–235 (2003).Google Scholar
[2] Bonn, M., Denzler, D. N., Funk, S., Haber, M. W. F., Wellershoff, S.-S., and Hohlfeld, J., Phys. Rev. B 61, 1101 (2000).Google Scholar
[3] Korte, F., Koch, J., and Chichkov, B.N., Appl. Phys. A 79, 879–881 (2004).Google Scholar
[4] Maruo, S., Nakamura, O., and Kawata, S., Opt. Lett. 22, 132–134 (1997).Google Scholar
[5] Kawata, S., Sun, H.-B., Tanaka, T., and Takada, K., Nature (London) 412, 697–698 (2001).Google Scholar
[6] Cumpston, B. H., Ananthavel, S. P., Barlow, S., Dyer, D. L., Ehrlich, J. E., Erskine, L. L., Heikal, A. A., Kuebler, S. M., Lee, I.-Y. S., McCord-Maughon, D., Qin, J., Rockel, H., Rumi, M., Wu, X.-L., Marder, S. R. and Perry, J. W., Nature (London) 398, 51–54 (1999).Google Scholar
[7] Sun, H.-B., Matsuo, S., and Misawa, H., Appl. Phys. Lett. 74, 786–788 (1999).Google Scholar
[8] Sun, H.-B., Mizeikis, V., Xu, Y., Juodkazis, S., Ye, J.-Y., Matsuo, S., and Misawa, H., Appl. Phys. Lett. 79, 1–3 (2001).Google Scholar
[9] Galajda, P. and Ormos, P., Appl. Phys. Lett. 78, 249–252 (2001).Google Scholar
[10] Deubel, M., von Freymann, G., Wegener, M., Pereira, S., Busch, K., and Soukoulis, C.M., Nature Mat. 3, 444–447 (2004).Google Scholar
[11] Straub, M. and Gu, M., Opt. Lett. 27, 1824–1826 (2001).Google Scholar
[12] Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., Houbertz, R., Domann, G., Schulz, J., Cronauer, C., Fröhlich, L., and Popall, M., Opt. Lett. 28, 301–303 (2003).Google Scholar
[13] Serbin, J., Ovsianikov, A., and Chichkov, B.N., Opt. Express 12, 5221 (2004).Google Scholar