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Direct Patterning of Molecular Organic Materials and Metals Using a Micromachined Printhead

Published online by Cambridge University Press:  01 February 2011

Jianglong Chen ,
Valérie Leblanc ,
Sung Hoon Kang ,
Marc A. Baldo ,
Paul J. Benning ,
Martin A. Schmidt  and
Vladimir Bulović
Jianglong Chen
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
Valérie Leblanc
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
Sung Hoon Kang
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
Marc A. Baldo
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
Paul J. Benning
Affiliation:
Hewlett-Packard Company, Corvallis, OR 97330U.S.A.
Martin A. Schmidt
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
Vladimir Bulović
Affiliation:
Massachusetts Institute of Technology, Microelectronics Technology Laboratories, Cambridge, MA 02139, U.S.A.
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Abstract

Micron-scale lateral patterning of molecular organic thin films is still one of the most challenging issues in the practical fabrication of pixelated organic light emitting device (OLED) displays. In this work we demonstrate organic and metal thin film patterning using a micromachined printhead that modulates the vapor flux of evaporated materials incident on a substrate. The printhead is integrated with an x-y-z manipulator that facilitates patterning within a vacuum environment at pressure of less than 5×10-6 Torr. This printing scheme enables direct, solvent-free and mask-free patterning of organic optoelectronic devices on diverse substrates. As an example we fabricated an OLED array of 30×30 νm Alq3 (tris(8-hydroxyqunolinato) aluminum) pixels. 30 νm wide silver patterns were also directly written using the same technique. The results show that this printing method is capable of patterning molecular organic materials and metals at high resolution (800 dpi).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 870: Symposium H – Giant-Area Electronics on Nonconventional Substrates , 2005 , H1.8
Copyright
Copyright © Materials Research Society 2005

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References

1 Adachi, C., Baldo, M. A., Thompson, M. E., and Forrest, S. R.. J. App. Phys. 90, 5048 (2001).Google Scholar
2 Forrest, S. R., Burrows, P. E., and Thompson, M. E., IEEE Spectrum 37, 29 (2000).Google Scholar
3 Shtein, M., Peumans, P., Benziger, J. B., and Forrest, S. R., J. App. Phys. 93, 7 (2003).Google Scholar
4 Drury, C. J., Mutsaers, C. M. J., Hart, C. M., Matters, M., and Leeuw, D. M. de, App. Phys. Lett. 3, 108 (1997).Google Scholar
5 Leblanc, V., Kang, S. H., Chen, J., Baldo, M. A., Benning, P. J., Bulovic, V., and Schmidt, M. A., in Micromachined printhead for the patterning of organic materials and metals, (to be published, Proc. of 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 2005).Google Scholar
6 Shtein, M., Gossenberger, H. F., Benziger, J. B., and Forrest, S. R., J. App. Phys. 89, 1470 (2001).Google Scholar
7 Shtein, M., Peumans, P., Benziger, J. B., and Forrest, S. R., Adv. Mater. 16, 1615 (2004).Google Scholar