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Direct laser fabrication of nanostructures on Si(001)

Published online by Cambridge University Press:  06 February 2015

Anahita Haghizadeh  and
Haeyeon Yang
Anahita Haghizadeh
Affiliation:
Department of Nanoscience and Nanoengineering, South Dakota School of Mines and Technology, Rapid City, SD 57701, U.S.A.
Haeyeon Yang*
Affiliation:
Department of Nanoscience and Nanoengineering, South Dakota School of Mines and Technology, Rapid City, SD 57701, U.S.A.
*
*Email: [email protected]
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Abstract

We study how the period of transient thermal gradient impacts on morphologies of nanostructures on the Si(001) surface. Strain-free, self-assembled nanodots as well as periodic nanowires are fabricated directly on Si(001) surfaces by applying high power laser pulses on the surface interferentially. The morphologies of the nanostructures are studied by atomic force microscopy. Generally, the laser irradiated surfaces show nanowires but nanodots are also observed. The nanowire width increases with interference period. The narrowest nanowires observed have the width smaller than 50 nm, which is four times smaller than the interference period while the nanodots have a base width of 43 nm and height of 8 nm.

Keywords

nanostructureSirapid solidification
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1748: Symposium II – Semiconductor Nanocrystals, Plasmonic Metal Nanoparticles, and Metal-Hybrid Structures , 2015 , mrsf14-1748-ii11-07
Copyright
Copyright © Materials Research Society 2015 

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References

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