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Direct Holographic Processing Using Laser Chemistry
Published online by Cambridge University Press: 21 February 2011
Abstract
By using two interfering laser beams to initiate localized chemical reactions at an interface, very high resolution, maskless microfabrication can be done over relatively large substrate areas. The resulting deposited or etched patterns can be used in a variety of electrooptical and electronic applications. In addition, this type of fabrication, which can be monitored in real time, provides insight into many new interfacial phenomena.
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- Copyright © Materials Research Society 1984
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