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Direct Fabrication of All-Inorganic Logic Elements and Microelectromechanical Systems from Nanoparticle Precursors

Published online by Cambridge University Press:  17 March 2011

Colin Bulthaup ,
Eric Wilhelm ,
Brian Hubert ,
Brent Ridley  and
Joe Jacobson
Colin Bulthaup
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Eric Wilhelm
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Brian Hubert
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Brent Ridley
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Joe Jacobson
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

Here we describe the fabrication of electrostatic motors by liquid embossing, a contact stamp-based method of patterning liquids with sub-micron resolution. We also demonstrate AFM nano-assembly which can produce sub-40 nm dots and lines by transferring either liquid or solid material from a reservoir to a deposition area. Both of these non-lithographic patterning techniques are applicable to nanocrystal, organic, and polymeric solutions and liquids.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D10.4.1
Copyright
Copyright © Materials Research Society 2001

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