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Direct Experimental Evidence for Monosilane Formation Even after High Temperature Proton Implantation of Crystalline Silicon

Published online by Cambridge University Press:  26 February 2011

Jakub Tatarkiewicz  and
Andrzej Król
Jakub Tatarkiewicz
Affiliation:
Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warszawa, Poland
Andrzej Król
Affiliation:
Department of Physics, SUNY at Stony Brook, Stony Brook, NY 11794-3800
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Abstract

The paper proves experimentally that no multisilanes are formed even after high temperature proton implantation of crystalline silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 104 , 1987 , 301
Copyright
Copyright © Materials Research Society 1988

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Footnotes

*

permanent address: Institute of Experimental Physics, Warsaw University, ul. Hoźa 69, 00681 Warszawa, Poland

References

Literature

[1]Pankove, J. I., Vance, R. O. and Berkeyheiser, J. E., Appi. Phys. Lett. 45, 1100 ( 1984);Google Scholar
[2]Johnson, N. M., Herring, C. and Chadi, D. J., Phys. Rev. Lett. 56, 769 ( 1986);Google Scholar
[3]Cardona, M., phys. stat. sol. (b) 118, 463 (1983);Google Scholar
[4]Tatarkiewicz, J. and Król, A., Phys. Rev. B32, 8401 (1985);Google Scholar
[5]Król, A. and Tatarklewicz, J., Acta Phys. Pol. A69, 941 (1986);Google Scholar
[6]Biegelsen, D. K., Street, R. A., Tsai, C. C. and Knights, J. C., Phys. Rev. B20, 4839 (1979”);Google Scholar
[7]Tatarkiewicz, J. and Winer, K., phys. stat. sol. (b) 139, 409 (1987);Google Scholar
[8]Cardona, M., J. Mol. Structure 141, 33 (1986);Google Scholar
[9]Pantelides, S. T., Phys. Rev. Lett. 58, 1344 (1987);Google Scholar
[10]Baranowski, J. M., to be published.Google Scholar