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Dielectric Properties of BST/(Y2O3)x(ZrO2)1-x/BST Trilayer Films

Published online by Cambridge University Press:  31 January 2011

Santosh K. Sahoo  and
D. Misra
Santosh K. Sahoo
Affiliation:
Department of Electrical and Computer Engineering, NJIT, Newark, New Jersey 07102, USA National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, Colorado 80401, USA
D. Misra
Affiliation:
Department of Electrical and Computer Engineering, NJIT, Newark, New Jersey 07102, USA
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Abstract

Thin films of Ba1-xSrxTiO3 (BST) are being actively investigated for applications in dynamic random access memories (DRAM) because of their properties such as high dielectric constant, low leakage current, and high dielectric breakdown strength. Various approaches have been used to improve the dielectric properties of BST thin films such as doping, graded compositions, and multilayer structures. We have found that inserting a ZrO2 layer in between two BST layers results in a significant reduction in dielectric constant as well as dielectric loss. In this work the effect of Y2O3 doped ZrO2 on the dielectric properties of BST/ZrO2/BST trilayer structure is studied. The structure Ba0.8Sr0.2TiO3/(Y2O3)x(ZrO2)1-x/Ba0.8Sr0.2TiO3 is deposited by a sol-gel process on platinized Si substrate. The composition (x) of the middle layer is varied while keeping the total thickness of the trilayer film constant. The dielectric constant of the multilayer film decreases with the increase of Y2O3 amount in the film whereas there is a slight variation in dielectric loss. In Y2O3 doped multilayer thin films, the dielectric loss is lower in comparison to other films and also there is good frequency stability in the loss in the measured frequency range and hence very suitable for microwave device applications.

Keywords

dielectric propertiessol-gelthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1292: Symposium K – Oxide Nanoelectronics , 2011 , mrsf10-1292-k03-17
Copyright
Copyright © Materials Research Society 2011

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References

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