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Diamond-Like Nanocomposite Films Fabricated in an Acetylene Atmosphere by Ion Beam Assisted Deposition: XPS Analysis

Published online by Cambridge University Press:  10 February 2011

Paul W. Wang ,
Jodi L. Sulak ,
Xing-Zhao Ding ,
Fu-Ming Zhang  and
Xiang-Huai Liu
Paul W. Wang
Affiliation:
aDepartment of Physics and Materials Research Institute, The University of Texas at El Paso, El Paso, Texas 79968, USA
Jodi L. Sulak
Affiliation:
aDepartment of Physics and Materials Research Institute, The University of Texas at El Paso, El Paso, Texas 79968, USA
Xing-Zhao Ding
Affiliation:
blon Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 865 Chang Ning Road, Shanghai 200050, China
Fu-Ming Zhang
Affiliation:
blon Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 865 Chang Ning Road, Shanghai 200050, China
Xiang-Huai Liu
Affiliation:
blon Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 865 Chang Ning Road, Shanghai 200050, China
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Abstract

Diamond-like nanocomposite (DLN) film, by embedding the diamond-like carbon into an amorphous SiO2 network, is a special class of modified diamond-like carbon (DLC) coating, which shows many excellent properties and potential applications. In this work, DLN films were fabricated in an acetylene atmosphere by ion beam assisted deposition. However, in order to understand the mechanical and electronic properties of the DLN film separation of the sp3 carbon bond from sp2 bond is necessary, because the former determines the hardness and the latter is related to the optical gap and electrical conductivity. Here we report the effect of the annealing on the relative concentrations of sp3 and sp2 hybrids in the film by using the XPS technique to decompose the C ls signal into sp3 and sp2 components. The XPS results clearly indicate that the distribution of the sp3 and sp2 C species is modified by thermal annealing at 700 °C. More sp3 species accumulate at the interface and gradually decrease towards the film surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 309
Copyright
Copyright © Materials Research Society 1999

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