Published online by Cambridge University Press: 15 February 2011
Plasma deposited fluoropolymer films are shown to have composition, chemical structures and properties variable continuously in a very broad range. Films obtained under high fragmentation and structure retention conditions are discussed and compared. The mechanism of deposition is shown to explain etching-deposition competition. Finally, actinometric spectroscopy is discussed briefly as a semi-quantitative diagnostics tool enabling the control of the chemistry of the process under high fragmentation conditions‥