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Development of Thin Film and Nanorod ZnO-Based LEDs and Sensors

Published online by Cambridge University Press:  01 February 2011

Stephen J. Pearton ,
L C Tien ,
H S Kim ,
D P Norton ,
J J Chen ,
H T Wang ,
B S Kang ,
F Ren ,
W T Lim  and
J Wright
...Show all authors
Stephen J. Pearton
Affiliation:
[email protected], University of Florida, Materials Science and Engineering, PO Box 116400,100 Rhines Hall, Gainesville, FL, 32611, United States
L C Tien
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
H S Kim
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
D P Norton
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
J J Chen
Affiliation:
[email protected], University of Florida, Chemical Engineering, Gainesville, FL, 32611, United States
H T Wang
Affiliation:
[email protected], University of Florida, Chemical Engineering, Gainesville, FL, 32611, United States
B S Kang
Affiliation:
[email protected], University of Florida, Chemical Engineering, Gainesville, FL, 32611, United States
F Ren
Affiliation:
[email protected], University of Florida, Chemical Engineering, Gainesville, FL, 32611, United States
W T Lim
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
J Wright
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
R Khanna
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
L F Voss
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
L Stafford
Affiliation:
[email protected], University of Florida, MSE, Gainesville, FL, 32611, United States
J Jun
Affiliation:
[email protected], University of Florida, ECE, Gainesville, FL, 32611, United States
Jenshan Lin
Affiliation:
[email protected], University of Florida, ECE, Gainesville, FL, 32611, United States
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Abstract

The development of new etching and contact metallurgies for the ZnO/ZnMgO/ZnCdO materials system and various approaches for realizing ZnO LEDs are reviewed. ZnO nanorod MOSFETs and pH sensors have been demonstrated. In addition, selective detection of hydrogen with Pt-coated single ZnO nanorods is discussed discussed. The Pt-coated single nanorods show a current response approximately a factor of three larger at room temperature upon exposure to 500ppm H2 in N2 than thin films of ZnO. The power consumption of these sensors can be very small (in the nW range) when using discontinuous coatings of Pt. Once the Pt coating becomes continuous, the current required to operate the sensors increases to the μW range. The ZnO nanorods are insensitive to oxygen in the measurement ambient.

Keywords

reactive ion etchingdevicesmicroelectronics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 957: Symposium K – Zinc Oxide and Related Materials , 2006 , 0957-K01-05
Copyright
Copyright © Materials Research Society 2007

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