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Development of Tailored Films and Surfaces for Use in Advanced Chemical Sensors

Published online by Cambridge University Press:  15 February 2011

Steve Semancik  and
Richard Cavicchi
Steve Semancik
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland
Richard Cavicchi
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland
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Abstract

The microstructure found at the surfaces and interfaces of active sensing materials can strongly affect the performance of solid state chemical sensors. This paper desribes research efforts aimed at improving oxide semiconductor-based gas sensors which utilize changes in conductance and diode current-voltage measurements as detection schemes. Studies of oxide surface modification and the formation of Pd/SnO2(110) and Pd/TiO2(110) interfaces are discussed as are the electrical changes for these systems induced by H2 or O2 adsorption. The fabrication of heteroepitaxial SnO2 films for use in planar sensing arrays is also reported and the expected advantages of these highly-ordered, uniform films for simplifying the transducing process are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 137
Copyright
Copyright © Materials Research Society 1992

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References

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