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Development of Polyphenylene—Oxide Film for Selective Encapsulation in Microelectronics

Published online by Cambridge University Press:  25 February 2011

Y-Tri Ton-That  and
Philip R. Troyk
Y-Tri Ton-That
Affiliation:
Pritzker Institute Of Medical Engineering. Illinois Institute Of Technology Chicago, IL 60616
Philip R. Troyk
Affiliation:
Pritzker Institute Of Medical Engineering. Illinois Institute Of Technology Chicago, IL 60616
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Abstract

Corrosion control of microelectronic devices which operate in high humidity is essentialfor reliability. A selective encapsulation method based on the electrochemical synthesisof polyphenylene—oxide (PPO) film has been investigated. The monomer is electrochemically polymerized and simultaneously deposited on the device surface to form an adherent coating. Electrical properties of PPO coatings on gold substrates subjected to water immersion and voltage bias were measured. The influence of coating thickness, adhesion promoter, and substrate cleanliness were investigated and optimized. In the early stage of biased immersion, coating failure was mainly caused by defects at the metal—polymer interface, whereas failure after extended testing was due to the slow degradation of polyphenylene—oxide in an aqueous media.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 109
Copyright
Copyright © Materials Research Society 1991

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